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Check No. Type Model Manufacture Vintage Serial Number Wafer Size Storage Location Configuration PDF Title PDF
00000959 CVD P-5000 AMAT 1993 4021 8 Japan 3x SiN P-5000 SN4021PDF
00000960 CVD P-5000 AMAT 1996 E6244, P3118 8 Japan 2x SiO, 1x Etch P-5000 SN E6244 P3118PDF
00000957 CVD P-5000 AMAT 1990 5564 8 Japan 3x SiN P-5000 SN5564PDF
00000956 CVD P-5000 AMAT 1990 5410 8 Japan 3x SACVD[Ozone BPSG] P-5000 SN5410PDF
00000954 CVD P-5000 AMAT 1996 E6209,P4937 8 Japan 2x SiO, 1xEtch P-5000 SN E6209 P4937PDF
00000955 CVD P-5000 AMAT 1995 4773 8 Japan 3x SiN P-5000 SN4773PDF
00000953 CVD P-5000 AMAT 1995 4777 8 Japan 2x SiO, 1xEtch P-5000 SN4777PDF
00001056 Etcher Centura DPS Metal R1 AMAT 2007 20750 8 Japan C2 body, NBLL, VHP+, 2xDPS R1 Metal, 2x ASP+, Fast C/D, Orienter Centura DPS Metal SN20750PDF
00001059 Etcher Centura eMax AMAT 1996 9028 8 Japan C1 body, NBLL, HP+, 3x eMax, Orienter Centura eMax SN9028PDF
00001060 Etcher Centura eMax AMAT 1997 9073 8 Japan C1 body, NBLL, HP+, 3xeMax, Orienter Centura eMax SN9073PDF
00001058 Etcher Centura SuperE AMAT 1998 9957 8 Japan C1 body, NBLL, HP+, 3x SuperE, Orienter Centura SuperE SN9957PDF
00000987 CMP / Wet SP-W813-U DNS 1998 57530-2560 8 Japan SP-W813-U SN57530-2560PDF
00000984 RTP LA-820 DNS 1996 55710-5028 8 Japan Analyzer missing LA820 SN55710-5028PDF
00000986 RTP LA-W820-A DNS 1996 55710-5036 8 Japan JMF, PC missing LA820 SN55710-5036PDF
00000990 Etcher TCP9600 Lam Research 1995 4228 8 Japan TCP9600 SN4228PDF
00000991 Etcher TCP9600SE Lam Research 1994 4125 8 Japan Autoloader, Classic,TCP, DSQ, Local RF Match. TCP9600SE SN4125PDF
00000992 Etcher TCP9600SE Lam Research 1996 4461 8 Japan Autoloader, Classic,TCP, DSQ, Local RF Match. TCP9600SE SN4461PDF
00000993 Etcher TCP9600SE Lam Research 1996 4469 8 Japan Autoloader, Classic,TCP, DSQ, Local RF Match. TCP9600SE SN4469PDF
00000994 Metrology FE4 Rudolph 1995 10703 8 Japan FE4 SN10703PDF
00001009 Etcher UNITY85DP TEL 1996 BBZ385 8 Japan 2x PE UNITY85DP SN BBZ385PDF
00001010 Etcher UNITY85DP TEL 1996 BBZ384 8 Japan 2x PE UNITY85DP SN BBZ384PDF
00001011 Etcher UNITY85DP TEL 1996 BBZ453 8 Japan 2x PE UNITY85DP SN BBZ453PDF
00001019 Furnace ALPHA-808SD TEL 1995 A00009540068 8 Japan DRY Ox,TS4000Z,GAS:N2・O2・Ar・HCL,150Wafer/Batch ALPHA-808SD S/N A00009540068PDF
00001021 Furnace ALPHA-808SD TEL 1994 A00009430023 8 Japan DRY Ox(Hi-Temp),TS4000Z,GAS:N2・O2・Ar・HCL,150Wafer/Batch ALPHA-808SD S/N A00009430023PDF
00001023 Furnace ALPHA-808SD TEL 1995 A00009550069 8 Japan DRY Ox,TS4000Z,GAS:N2・O2・Ar・HCL,150Wafer/Batch ALPHA-808SD S/N A00009550069PDF
00001024 Furnace ALPHA-808SD TEL 1996 A00009610040 8 Japan DRY Ox(Hi-Temp),TS4000Z,GAS:N2・O2・Ar・HCL,150Wafer/Batch ALPHA-808SD S/N A00009610040PDF
00001025 Furnace ALPHA-808SD TEL 1996 A00009610041 8 Japan DRY Ox(Hi-Temp),TS4000Z,GAS:N2・O2・Ar・HCL,150Wafer/Batch ALPHA-808SD S/N A00009610041PDF
00001026 Furnace ALPHA-808SD TEL 1996 A00009610042 8 Japan DRY Ox(Hi-Temp),TS4000Z,GAS:N2・O2・Ar・HCL,150Wafer/Batch ALPHA-808SD S/N A00009610042PDF
00001028 Furnace ALPHA-808SD TEL 1996 A00009610044 8 Japan DRY Ox(Hi-Temp),TS4000Z,GAS:N2・O2・Ar・HCL,150Wafer/Batch ALPHA-808SD S/N A00009610044PDF
00001029 Furnace ALPHA-808SD TEL 1996 A00009620045 8 Japan DRY Ox(Hi-Temp),TS4000Z,GAS:N2・O2・Ar・HCL,150Wafer/Batch ALPHA-808SD S/N A00009620045PDF
00001030 Furnace ALPHA-808SD TEL 1996 A00009620046 8 Japan DRY Ox(Hi-Temp),TS4000Z,GAS:N2・O2・Ar・HCL,150Wafer/Batch ALPHA-808SD S/N A00009620046PDF
00001031 Furnace ALPHA-808SD TEL 1996 A00009620047 8 Japan DRY Ox(Hi-Temp),TS4000Z,GAS:N2・O2・Ar・HCL,150Wafer/Batch ALPHA-808SD S/N A00009620047PDF
00001033 Furnace ALPHA-808SD TEL 1996 A00009660295 8 Japan DRY Ox(Hi-Temp),TS4000Z,GAS:N2・O2・Ar・HCL,150Wafer/Batch ALPHA-808SD S/N A00009660295PDF
00001034 Furnace ALPHA-808SD TEL 1996 A00009660296 8 Japan DRY Ox(Hi-Temp),TS4000Z,GAS:N2・O2・Ar・HCL,150Wafer/Batch ALPHA-808SD S/N A00009660296PDF
00001035 Furnace ALPHA-808SD TEL 1996 A00009610035 8 Japan DRY Ox,TS4000Z,GAS:N2・O2・Ar・HCL,150Wafer/Batch ALPHA-808SD S/N A00009610035PDF
00001036 Furnace ALPHA-808SD TEL 1994 A00009430019 8 Japan DRY Ox(Hi-Temp),TS4000Z,GAS:N2・O2・Ar・HCL,150Wafer/Batch ALPHA-808SD S/N A00009430019PDF
00001055 Furnace ALPHA-8S-Z TEL 1999 A00009990012 8 Japan PYRO, WAVES, GAS : N2・O2・H2・HCL, 100wafer/Batch, VOS-40-017 ALPHA-8S-Z A00009990012PDF
00001012 Lithography / Track UMA-1002-HC93 Ushio 1997 9709001 8 Japan Non chiller type UMA-1002-HC93 SN9709001PDF
00001013 Lithography / Track UMA-1002-HC93 Ushio 1997 9706004 8 Japan Non chiller type UMA-1002-HC93 SN9706004PDF
00001061 Lithography / Track UMA-1002-HC93 Ushio 2001 0108001 8 Japan With chiller type UMA-1002-HC93 SN0108001PDF
00001062 Lithography / Track UMA-1002-HC93 Ushio 2004 0407001 8 Japan With chiler type UMA-1002-HC93 SN0407001PDF
00001063 Lithography / Track UMA-1002-HC93 Ushio 1996 9607001 8 Japan Non chiller type UMA-1002-HC93 SN9607001PDF
00001064 Lithography / Track UMA-1002-HC93 Ushio 1996 9607003 8 Japan Non chiller type UMA-1002-HC93 SN9607003PDF
00001065 Lithography / Track UMA-1002-HC93 Ushio 1996 9607002 8 Japan With chiller type UMA-1002-HC93 SN9607002PDF
00001066 Lithography / Track UMA-1002-HC93 Ushio 1996 9607004 8 Japan With chiller type UMA-1002-HC93 SN9607004PDF
00001067 Lithography / Track UMA-1002-HC93 Ushio 1999 9908001 8 Japan With chiller type UMA-1002-HC93 SN9908001PDF
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