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Check No. Type Model Manufacture Vintage Serial Number Wafer Size Storage Location Configuration PDF Title PDF
00000959 CVD P-5000 AMAT 1993 4021 8 Japan 3x SiN P-5000 SN4021PDF
00000960 CVD P-5000 AMAT 1996 E6244, P3118 8 Japan 2x SiO, 1x Etch P-5000 SN E6244 P3118PDF
00000957 CVD P-5000 AMAT 1990 5564 8 Japan 3x SiN P-5000 SN5564PDF
00000954 CVD P-5000 AMAT 1996 E6209,P4937 8 Japan 2x SiO, 1xEtch P-5000 SN E6209 P4937PDF
00000955 CVD P-5000 AMAT 1995 4773 8 Japan 3x SiN P-5000 SN4773PDF
00000953 CVD P-5000 AMAT 1995 4777 8 Japan 2x SiO, 1xEtch P-5000 SN4777PDF
00001056 Etcher Centura DPS Metal R1 AMAT 2007 20750 8 Japan C2 body, NBLL, VHP+, 2xDPS R1 Metal, 2x ASP+, Fast C/D, Orienter Centura DPS Metal SN20750PDF
00000984 RTP LA-820 DNS 1996 55710-5028 8 Japan Analyzer missing LA820 SN55710-5028PDF
00000986 RTP LA-W820-A DNS 1996 55710-5036 8 Japan JMF, PC missing LA820 SN55710-5036PDF
00000990 Etcher TCP9600 Lam Research 1995 4228 8 Japan TCP9600 SN4228PDF
00000992 Etcher TCP9600SE Lam Research 1996 4461 8 Japan Autoloader, Classic,TCP, DSQ, Local RF Match. TCP9600SE SN4461PDF
00000994 Metrology FE4 Rudolph 1995 10703 8 Japan FE4 SN10703PDF
00001009 Etcher UNITY85DP TEL 1996 BBZ385 8 Japan 2x PE UNITY85DP SN BBZ385PDF
00001010 Etcher UNITY85DP TEL 1996 BBZ384 8 Japan 2x PE UNITY85DP SN BBZ384PDF
00001011 Etcher UNITY85DP TEL 1996 BBZ453 8 Japan 2x PE UNITY85DP SN BBZ453PDF
00001055 Furnace ALPHA-8S-Z TEL 1999 A00009990012 8 Japan PYRO, WAVES, GAS : N2・O2・H2・HCL, 100wafer/Batch, VOS-40-017 ALPHA-8S-Z A00009990012PDF
00001068 Furnace ALPHA-8S-ZA TEL 1997 A00009755279 8 Fujisawa Dry Oxide, TS4000Z, GAS: N2/O2/HCL, 150wafer/batch, Heater Missing ALPHA-8S-ZA A00009755279PDF
00001012 Lithography / Track UMA-1002-HC93 Ushio 1997 9709001 8 Japan Non chiller type UMA-1002-HC93 SN9709001PDF
00001013 Lithography / Track UMA-1002-HC93 Ushio 1997 9706004 8 Japan Non chiller type UMA-1002-HC93 SN9706004PDF
00001061 Lithography / Track UMA-1002-HC93 Ushio 2001 0108001 8 Japan With chiller type UMA-1002-HC93 SN0108001PDF
00001063 Lithography / Track UMA-1002-HC93 Ushio 1996 9607001 8 Japan Non chiller type UMA-1002-HC93 SN9607001PDF
00001065 Lithography / Track UMA-1002-HC93 Ushio 1996 9607002 8 Japan With chiller type UMA-1002-HC93 SN9607002PDF
00001066 Lithography / Track UMA-1002-HC93 Ushio 1996 9607004 8 Japan With chiller type UMA-1002-HC93 SN9607004PDF
00001067 Lithography / Track UMA-1002-HC93 Ushio 1999 9908001 8 Japan With chiller type UMA-1002-HC93 SN9908001PDF
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